| |
HFM-300 Meter |
HFC-302 Controller |
Range
(User Selectable) |
0 - 10 sccm to 0 - 25 slm (N2) |
0 - 10 sccm to 0 - 25 slm (N2) |
| Accuracy |
+ 0.75% of F.S. 5 sccm to 10 slm
+ 1.00% of F.S. 10 slm to 25 slm |
+ 0.75% of F.S. 5 sccm to 10 slm
+ 1.00% of F.S. 10 slm to 25 slm |
| Repeatability |
+ 0.07% of full scale |
+ 0.07% of full scale |
| Maximum Working Pressure |
500 PSIG (Optional 1000 PSIG) |
500 PSIG (Optional 1000 PSIG) |
| Analog I/O (Standard) |
0 - 5 VDC |
0 - 5 VDC |
| Analog I/O (Optional) |
4 - 20 mA I.O, 0 - 20 mA,
0 - 5 VDC / 4 - 20 mA I/O |
4 - 20 mA I.O, 0 - 20 mA,
0 - 5 VDC / 4 - 20 mA I/O |
| Fitting Options |
VCR®, VCO®, Swagelok®, Straight Thread, Surface Mount
|
VCR®, VCO®, Swagelok®, Straight Thread, Surface Mount
|
| Elastomer Seal Options |
Viton®, Kalrez, Buna-N, Neoprene |
Viton®, Kalrez, Buna-N, Neoprene |
Connector
|
15-pin subminiature D |
15-pin subminiature D |
Power Requirements
|
+ 15VDC @ + 55mA
|
+ 15VDC @ + 55mA
|
| Wetted Materials |
316L SS, Nickel 200, 302 SS |
3316L SS, Nickel 200, 302 SS, Kalrez® (Valve Seat)
|
